Method of supplying raw material gas, apparatus for supplying raw material gas, and apparatus for forming film on substrate

An apparatus for supplying a raw material gas, comprising:

• a raw material container configured to accommodate a solid raw material and including at least one heater configured to heat the solid raw material;
• a power supply configured to supply a power to the at least one heater;
• a carrier gas supply configured to supply a carrier gas to the raw material container;
• an index value calculator configured to calculate an index value having a corresponding relationship with a remaining amount of the solid raw material;
• a raw material gas flow path configured to supply the raw material gas obtained from the raw material container to a consumption zone in which a substrate is disposed;
• and
• a controller,
• wherein the controller is configured to generate a control signal for executing a process including:
• supplying the power to the at least one heater and heating an inside of the raw material container to sublimate the solid raw material;
• supplying the carrier gas to the raw material container being heated by the at least one heater and mixing the carrier gas with the sublimated solid raw material to supply a mixed gas as the raw material gas to the consumption zone;
• and
• calculating the index value, and
• wherein, in sublimating the solid raw material, the controller is configured to supply a power corresponding to the index value to the at least one heater, based on a corresponding relationship between the index value, which is preset, and the power supplied to the at least one heater.