Transducer
AssigneeSeiko Epson Corporation
InventorsTeruo TAKIZAWA, Shota KIGURE
Life of this patent
Estimating the term…
Loading patent…
AssigneeSeiko Epson Corporation
InventorsTeruo TAKIZAWA, Shota KIGURE
Estimating the term…
A transducer includes a first substrate; a second substrate that is disposed to overlap the first substrate and is provided with an insulating layer on a surface of the second substrate; a functional element provided between the first substrate and the second substrate; and a metal eutectic layer that bonds the first substrate and the second substrate to each other in a bonding region positioned around the functional element, in which a recess is provided in a first surface of the second substrate on the first substrate side, the recess is configured with a second surface that is a bottom, and a side wall that connects the first surface and the second surface, the insulating layer includes a first portion provided on the first surface, a second portion provided on the side wall, and a third portion provided on the second surface, and the bonding region is disposed between the second portions when viewed in plan in a Y axis direction along a Y axis.
A transducer comprising, when three axes orthogonal to each other are set as an X axis, a Y axis, and a Z axis:
Dependencies are inferred from the claim text.