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AssigneeCanon Kabushiki Kaisha
InventorsYOSUKE MURAKAMI, KAZUKI NAKAGAWA, MASAHIRO TAMURA
Estimating the term…
A device including a mold holding unit that holds a mold, a mold driver that moves the mold holding unit, a substrate holding unit that holds a substrate, a substrate driver that moves the substrate holding unit, and a gas supply unit that supplies a gas to an imprint space between the mold and the substrate. A control unit causes an imprinting operation to be sequentially performed on a plurality of imprint regions. When a substrate moving direction is to be changed from a first to a second direction to move the substrate from a first to a second imprint region, the control unit causes the gas supply unit to supply the gas to the imprint space from the first and second directions during the imprinting operation being performed on the first imprint region and before the moving direction changes from the first to the second direction.
An imprint device comprising:
An imprint method using an imprint device including a mold holding unit configured to holding a mold, a substrate holding unit configured to holding a substrate, and a gas supply unit configured to supply a gas to an imprint space between the mold and the substrate, the imprint method comprising:
An imprint method using an imprint device including a mold holding unit configured to holding a mold, a substrate holding unit configured to holding a substrate, and a gas supply unit configured to supply a gas to an imprint space between the mold and the substrate, the imprint method comprising:
A non-transitory computer-readable storage medium configured to store a computer program to control an imprint device,
An article manufacturing method using an imprint device including:
Dependencies are inferred from the claim text.