Process chamber with side support

A process chamber comprising:

• a front flange configured to connect to an input manifold;
• a rear flange configured to connect to an output manifold;
• a curved upper wall, a curved lower wall, a first side wall, and a second side wall, each extending longitudinally between the front flange and the rear flange and cooperating to form an internal cavity between the front flange and the rear flange, wherein:
• the first side wall extends linearly in a vertical direction between the curved upper wall and the curved lower wall along a first side of the process chamber, and
• the second side wall extends linearly in the vertical direction between the curved upper wall and the curved lower wall along a second side of the process chamber.

A process chamber comprising:

• an upper wall extending in a longitudinal direction between a first end and a second end of the process chamber, wherein the upper wall is curved in a lateral direction between a first side and a second side of the process chamber;
• a lower wall extending in the longitudinal direction between the first end and the second end of the process chamber, wherein the lower wall is curved in a lateral direction between the first side and the second side of the process chamber;
• a first side wall extending along the first side in the longitudinal direction between the first end and the second end, and extending linearly in a vertical direction between the upper wall and the lower wall;
• a second side wall extending along the second side in the longitudinal direction between the first end and the second end, and extending linearly in the vertical direction between the upper wall and the lower wall, wherein the upper wall, lower wall, first side wall, and the second side wall define an internal cavity between the first end and the second end;
• and
• a shelf within the internal cavity, wherein the shelf extends between and is attached to interior surfaces of the first side wall and the second side wall.