Mems oscillating element and method for operating a mems oscillating element

A method for operating a micro-electromechanical oscillating element, the MEMS oscillating element including a first component, a movable component mounted so as to be movable relative to the first component at least in a first direction and that contacts the first component in a stop position upon a sufficiently large deflection, and at least one actuator component that is configured as a bending beam clamped on both sides with a beam longitudinal axis running perpendicular to the first direction and that selectively assumes an undeformed configuration and a deformed configuration, in which the at least one actuator component is deflected at least partially perpendicular to the beam longitudinal axis, the method comprising the following steps:

• S1) recognizing a stiction state in which the movable component is held to the first component by a force;
• and
• S2) heating the at least one actuator component in such a way that the at least one actuator component buckles perpendicular to the longitudinal axis of the beam from the undeformed to the deformed configuration and releases the movable component from the first component by a mechanical impulse.