Shutter apparatus for a lithography apparatus and/or a mask test apparatus and lithography apparatus/mask test apparatus

Abstract

A shutter apparatus for a lithography apparatus and/or mask test apparatus, having a shutter disc mounted rotatably about a rotation axis (A) with at least one opening spaced apart from the rotation axis (A) and serving for transmitting operating light of the lithography apparatus and/or mask test apparatus, and a magnetic drive and mounting device, with the aid of which the shutter disc is mounted rotatably about the rotation axis (A) and which is configured for rotationally driving the shutter disc about the rotation axis (A), wherein the shutter disc and the drive and mounting device are configured to be arranged within a vacuum housing of the lithography apparatus and/or mask test apparatus.

Dependencies are inferred from the claim text.