Apparatus and method for analysing a process abnormality of a laser process

Abstract

An apparatus for analyzing a laser process, the apparatus including a sensor module configured to acquire an optical signal generated during a laser process of a target, and a processor configured to detect an abnormality of the laser process through an instantaneous change analysis process of the optical signal performed whenever the optical signal is acquired by the sensor module, and a longitudinal change analysis process of the optical signal performed at a time point when a target time section ends, the target time section being a time during which the laser process is performed.

Dependencies are inferred from the claim text.