Heat exchange module and substrate processing apparatus including the same

Abstract

A heat exchange module installed to be in constant communication with a high-pressure vessel forming a heating space (S2) under high-temperature and high-pressure process conditions, comprises: a main body unit (500) forming a heat exchange space (S4) therein; a flow path forming unit (600) provided to form a flow path in which exhaust gas discharged from the high-pressure vessel flows within the heat exchange space (S4); and a heat medium piping unit (700), at least a portion of which is installed within the heat exchange space (S4), with a heat medium flowing therein for direct or indirect heat exchange with the exhaust gas.

Dependencies are inferred from the claim text.