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US 2026/0048392 A1Published application
Substrate for inspection device, inspection device, and method for manufacturing inspection device
AssigneeDexerials Corporation
InventorsTakuya MONJU, Manabu HIRAKAWA
Life of this patent
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Abstract
There is provided a substrate for an inspection device. The substrate has an average thickness of 250 μm or greater and 350 μm or less, and a density of 0.25×106 g/m3 or greater and 0.40×106 g/m3 or less.
Claims10
A substrate for an inspection device, the substrate having:
- an average thickness of 250 μm or greater and 350 μm or less;
- and
- a density of 0.25×106 g/m3 or greater and 0.40×106 g/m3 or less.
Dependencies are inferred from the claim text.