Laser beam extraction using distributed bragg reflector (dbr) mirror systems with a piezoelectric layer

A Variable Reflectance Distributed Bragg Reflector (VR-DBR) mirror device comprising:

• a transparent substrate;
• a plurality of first stacked layers of materials with at least two different refractive indices to form a first distributed Bragg reflector (DBR1) overlying the transparent substrate:
• a plurality of second stacked layers of materials with at least two different refractive indices to form a second distributed Bragg reflector (DBR2);
• a piezoelectric layer comprising a plurality of voids configured between the first distributed Bragg reflector and the second distributed Bragg reflector;
• at least one electrical contact coupled to the piezoelectric layer containing the voids, the electrical contact characterized by a conductive material;
• and
• an electric energy coupled to the electrical contact and configured to supply an electric field in the piezoelectric layer containing the voids to alter a refractive index of the piezoelectric layer and change a reflection spectrum of the VR-DBR mirror device to allow a laser beam to traverse through a portion of the VR-DBR mirror device;
• wherein at a wavelength of a laser emission of the laser beam, the VR-DBR mirror device has an initial reflectivity of more than 99% that is changed to a reflectivity of 30% and less.

A Variable Reflectance Distributed Bragg Reflector (VR-DBR) mirror device comprising:

• a transparent substrate;
• a plurality of stacked layers of materials with at least two different refractive indices to form a distributed Bragg reflector (DBR) overlying the transparent substrate, the distributed Bragg reflector comprising a first distributed Bragg reflector and a second distributed Bragg reflector:
• a piezoelectric layer comprising a plurality of voids configured between the first distributed Bragg reflector and the second distributed Bragg reflector;
• at least one electrical contact coupled to the piezoelectric layer containing the voids, the electrical contact characterized by a conductive material;
• and
• an electric energy coupled to the electrical contact and configured to supply an electric field in the piezoelectric layer containing the voids to alter a refractive index of the piezoelectric layer and change a reflection spectrum of the VR-DBR mirror device to allow a laser beam to traverse through a portion of the VR-DBR mirror device;
• wherein the VR-DBR mirror device changes a reflectance from more than 99% to less than 30% at a laser emission wavelength to allow the laser beam to traverse through the portion of the VR-DBR mirror device.

A Variable Reflectance Distributed Bragg Reflector (VR-DBR) mirror device comprising:

• a transparent substrate;
• a plurality of first stacked layers of materials with at least two different refractive indices to form a first distributed Bragg reflector (DBR) overlying the transparent substrate;
• and a second distributed Bragg reflector:
• a piezoelectric layer comprising a plurality of voids configured between the first distributed Bragg reflector and the second distributed Bragg reflector;
• at least one electrical contact coupled to the piezoelectric layer containing the voids, the electrical contact characterized by a conductive material;
• and
• an electric energy coupled to the electrical contact and configured to supply an electric field in the piezoelectric layer containing the voids to alter a refractive index of the piezoelectric layer and change a reflection spectrum of the VR-DBR mirror device to allow a laser beam to traverse through a portion of the VR-DBR mirror device;
• wherein the piezoelectric layer comprises a plurality of interdigital transducers (IDTs) formed on the piezoelectric layer, each of the plurality of IDTs characterized by a plurality of comb-like structures comprising a conductive material and coupled to an RF signal to generate one or more acoustic waves.

A Variable Reflectance Distributed Bragg Reflector (VR-DBR) mirror device comprising:

• a transparent substrate;
• a plurality of first stacked layers of materials with at least two different refractive indices to form a first distributed Bragg reflector (DBR) overlying the transparent substrate;
• and a plurality of second stacked layers of materials with at least two different refractive indices to form a second distributed Bragg reflector:
• a piezoelectric layer comprising a plurality of voids configured between the first distributed Bragg reflector and the second distributed Bragg reflector;
• at least one electrical contact coupled to the piezoelectric layer containing the voids, the electrical contact characterized by a conductive material;
• and
• an electric energy coupled to the electrical contact and configured to supply an electric field in the piezoelectric layer containing the voids to alter a refractive index of the piezoelectric layer and change a reflection spectrum of the VR-DBR mirror device to allow a laser beam to traverse through a portion of the VR-DBR mirror device;
• wherein the first plurality of stacked layers or the plurality of second stacked layers include a dielectric material selected from the group consisting of silicon dioxide (SiO2), titanium dioxide (TiO), tantalum oxide (Ta2O5), and hafnium oxide (HfO2).

A Variable Reflectance Distributed Bragg Reflector (VR-DBR) mirror device comprising:

• a transparent substrate;
• a plurality of first stacked layers of materials with at least two different refractive indices to form a first distributed Bragg reflector (DBR) overlying the transparent substrate:
• a second distributed Bragg reflector made of a plurality of second stacked layers of materials with at least two different refractive indices;
• a piezoelectric layer comprising a plurality of voids configured between the first distributed Bragg reflector and the second distributed Bragg reflector;
• at least one electrical contact coupled to the piezoelectric layer containing the voids, the electrical contact characterized by a conductive material;
• and
• an electric energy coupled to the electrical contact and configured to supply an electric field in the piezoelectric layer containing the voids to alter a refractive index of the piezoelectric layer and change a reflection spectrum of the VR-DBR mirror device to allow a laser beam to traverse through a portion of the VR-DBR mirror device;
• wherein the plurality of first stacked layers or the plurality of second stacked layers include a semiconductor material selected from the group consisting of gallium arsenide (GaAs) and an alloy of gallium, aluminum, and arsenic (AlxGa1-xAs) (1≥x>0).

A Variable Reflectance Distributed Bragg Reflector (VR-DBR) mirror device comprising:

• a transparent substrate;
• a plurality of first stacked layers of materials with at least two different refractive indices to form a first distributed Bragg reflector (DBR) overlying the transparent substrate;
• and a second distributed Bragg reflector formed from a plurality of second stacked layers;
• a piezoelectric layer comprising a plurality of voids configured with a single or the plurality of stacked layers such that the piezoelectric layer is configured between the first distributed Bragg reflector and the second distributed Bragg reflector;
• at least one electrical contact coupled to the piezoelectric layer containing the voids, the electrical contact characterized by a conductive material;
• and
• a electric energy coupled to the electrical contact and configured to supply an electric field in the piezoelectric layer containing the voids to alter a refractive index of the piezoelectric layer and change a reflection spectrum of the VR-DBR mirror device to allow a laser beam to traverse through a portion of the VR-DBR mirror device;
• wherein the plurality of first stacked layers or the plurality of second stacked layers include a semiconductor material comprising voids and is selected from the group consisting of gallium arsenide (GaAs) and an alloy of gallium, aluminum, and arsenic (AlxGa1-xAs) (1≥x>0).

A Variable Reflectance Distributed Bragg Reflector (VR-DBR) mirror device comprising:

• a transparent substrate;
• a plurality of first stacked layers of materials with at least two different refractive indices to form a first distributed Bragg reflector (DBR) overlying the transparent substrate;
• a second distributed Bragg reflector coupled to the first distributed Bragg reflector;
• a piezoelectric layer comprising a plurality of voids configured between the first distributed Bragg reflector and the second distributed Bragg reflector;
• at least one electrical contact coupled to the piezoelectric layer containing the voids, the electrical contact characterized by a conductive material;
• and
• a electric energy coupled to the electrical contact and configured to supply an electric field in the piezoelectric layer containing the voids to alter a refractive index of the piezoelectric layer and change a reflection spectrum of the VR-DBR mirror device to allow a laser beam to traverse through a portion of the VR-DBR mirror device;
• wherein the plurality of first stacked layers include a semiconductor material comprising voids and comprises a gallium nitride (GaN).

A Variable Reflectance Distributed Bragg Reflector (VR-DBR) mirror device comprising:

• a transparent substrate;
• a plurality of first stacked layers of materials with at least two different refractive indices to form a first distributed Bragg reflector (DBR) overlying the transparent substrate:
• a second distributed Bragg reflector;
• a piezoelectric layer comprising a plurality of voids configured between the first distributed Bragg reflector and the second distributed Bragg reflector;
• at least one electrical contact coupled to the piezoelectric layer containing the voids, the electrical contact characterized by a conductive material;
• and
• a electric energy coupled to the electrical contact and configured to supply an electric field in the piezoelectric layer containing the voids to alter a refractive index of the piezoelectric layer and change a reflection spectrum of the VR-DBR mirror device to allow a laser beam to traverse through a portion of the VR-DBR mirror device;
• wherein the DBR is composed of multi-layer pairs of a dielectric material group or a semiconductor layer group.

A Variable Reflectance Distributed Bragg Reflector (VR-DBR) mirror device comprising:

• a transparent substrate;
• a plurality of first stacked layers of materials with at least two different refractive indices to form a first distributed Bragg reflector (DBR) overlying the transparent substrate:
• a second distributed Bragg reflector;
• a piezoelectric layer comprising a plurality of voids coupled between the first distributed Bragg reflector and the second distributed Bragg reflector;
• at least one electrical contact coupled to the piezoelectric layer containing the voids, the electrical contact characterized by a conductive material;
• and
• a electric energy coupled to the electrical contact and configured to supply an electric field in the piezoelectric layer containing the voids to alter a refractive index of the piezoelectric layer and change a reflection spectrum of the VR-DBR to allow a laser beam to traverse through a portion of the VR-DBR;
• wherein the voids in a piezoelectric layer are characterized by one or more arbitrary shapes with an inner surface being a combination of more than one crystalline plane.

A Variable Reflectance Distributed Bragg Reflector (VR-DBR) mirror device comprising:

• a transparent substrate;
• a plurality of first stacked layers of materials with at least two different refractive indices to form a first distributed Bragg reflector (DBR) overlying the transparent substrate;
• a second distributed Bragg reflector coupled to the first distributed Bragg reflector;
• a piezoelectric layer comprising a plurality of voids coupled to the first distributed Bragg reflector and the second distributed Bragg reflector;
• at least one electrical contact coupled to the piezoelectric layer containing the voids, the electrical contact characterized by a conductive material;
• and
• a electric energy coupled to the electrical contact and configured to supply an electric field in the piezoelectric layer containing the voids to alter a refractive index of the piezoelectric layer and change a reflection spectrum of the VR-DBR mirror device to allow a laser beam to traverse through a portion of the VR-DBR mirror device;
• wherein the voids of the piezoelectric layer reduce a refractive index of one or more bulk piezoelectric materials such that the electric energy causes a response of the voids to induce a refractive index change between 0.0001 to 0.05.

A Variable Reflectance Distributed Bragg Reflector (VR-DBR) mirror device comprising:

• a transparent substrate;
• a plurality of first stacked layers of materials with at least two different refractive indices to form a first distributed Bragg reflector (DBR1) overlying the transparent substrate and a second distributed Bragg reflector (DBR2):
• a piezoelectric layer comprising a plurality of voids configured between DBR1 and DBR2;
• at least one electrical contact coupled to the piezoelectric layer containing the voids, the electrical contact characterized by a conductive material;
• and
• a electric energy coupled to the electrical contact and configured to supply an electric field in the piezoelectric layer containing the voids to alter a refractive index of the piezoelectric layer and change a reflection spectrum of the VR-DBR mirror device to allow a laser beam to traverse through a portion of the VR-DBR mirror device;
• wherein the piezoelectric layer contains at least one material selected from the group consisting of lithium niobate (LiNbO3), lithium tantalate (LiTaO3), quartz (SiO2), zinc oxide (ZnO), aluminum nitride (AlN), GaAs, and gallium nitride (GaN).