Purifying phosphorus halide compounds

Abstract

This disclosure provides a vessel and methods for handling high-purity phosphorus fluoride compounds. The vessel can include a phosphorus fluoride component including a phosphorus fluoride compound with a purity of at least 99.9%, as measured by gas chromatography and/or infrared spectroscopy. Also disclosed is a method which includes obtaining a solid component containing a metal fluorophosphate compound and water, heating the solid component to remove water, and further heating to form a phosphorus fluoride compound with a purity of at least 99.9%, as measured by gas chromatography and/or infrared spectroscopy.

Dependencies are inferred from the claim text.