US 2026/0040902 A1Published application

Test structure

AssigneeWinbond Electronics Corp.

InventorsShih-Ming Wang, Jun-Jie Pang

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Abstract

A test structure including the following members is provided. A substrate includes an array region and a peripheral region. The array region has a first side and a second side opposite to each other. An isolation structure is located in the substrate. The isolation structure defines active regions in the substrate of the array region. Word lines pass through the active regions and are insulated from the substrate. The word lines include first word lines and second word lines arranged alternately. First contacts are electrically connected to the first word lines. Second contacts are electrically connected to the second word lines. The first contacts and the second contacts are arranged in a staggered manner. First conductive lines are electrically connected to the first contacts. Second conductive lines are electrically connected to the second contacts. The second conductive lines are extended from the peripheral region into the array region.

Claims20

Dependent claims

A test structure, comprising:

a substrate comprising an array region and a peripheral region, wherein the array region has a first side and a second side opposite to each other;
an isolation structure located in the substrate, wherein the isolation structure defines a plurality of active regions in the substrate of the array region;
and
a plurality of word lines passing through the plurality of active regions and insulated from the substrate, wherein the plurality of word lines comprise a plurality of first word lines and a plurality of second word lines arranged alternately;
a plurality of first contacts located at the first side of the array region and electrically connected to the plurality of first word lines;
a plurality of second contacts located at the first side of the array region and electrically connected to the plurality of second word lines, wherein the plurality of first contacts and the plurality of second contacts are arranged in a staggered manner;
a plurality of first conductive lines electrically connected to the plurality of first contacts;
and
a plurality of second conductive lines electrically connected to the plurality of second contacts, wherein the plurality of second conductive lines are extended from the peripheral region into the array region.

6 more elements

Dependencies are inferred from the claim text.