Retention device
AssigneeNiterra Co., Ltd.
InventorsYasuaki KIMIKADO, Daisuke UEMATSU, Honami OHARA, Takumi SANARI
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AssigneeNiterra Co., Ltd.
InventorsYasuaki KIMIKADO, Daisuke UEMATSU, Honami OHARA, Takumi SANARI
Estimating the term…
A retention substrate includes: a plate-shaped member having a first surface and a second surface and containing a ceramic material as a main component, the first surface for retaining an object, the second surface disposed opposite to the first surface; a gas channel formed in the plate-shaped member; and a gas-permeable porous body filling part of the gas channel and containing a ceramic material as a main component. The gas channel including a vertical channel section and a horizontal channel section. The vertical channel section having a gas outlet opening in the first surface and extending from the gas outlet toward the second surface. The horizontal channel section connected to the vertical channel section and extending parallel to the first surface. The porous body filling the vertical channel section and forming a space adjacent to the second surface and inside the horizontal channel section.
A retention device comprising a retention substrate including:
Dependencies are inferred from the claim text.