Station and method for measuring the practicle contamination of a transport enclosure for the atmospheric transport and storage of semiconductor wafers

A measurement station for measuring particle contamination in a transport enclosure for the atmospheric transport and storage of semiconductor wafers, said transport enclosure comprising a shell and a removable door configured to close the shell, the shell having at least one ventilation port provided with a particle filter, the measurement station comprising:

• a particle counter and an interface configured to be coupled to the shell in place of the door, said interface comprising a sampling orifice fluidly connected to the particle counter;
• and
• a clean-gas injection device comprising at least one injection line comprising at least one injection nozzle configured to be fluidly connected to a ventilation port of the transport enclosure coupled to the interface for injecting clean gas into the transport enclosure, from outside the transport enclosure, through the at least one ventilation port of the transport enclosure.