Photovoltaic cell, method for producing the same and photovoltaic module

Abstract

Disclosed is a method for producing a photovoltaic cell. The method includes providing a silicon wafer, forming a tunneling oxide layer on a first side of the silicon wafer, forming an amorphous silicon layer having alternatingly arranged P-type amorphous silicon and N-type amorphous silicon on a side of the tunneling oxide layer away from the silicon wafer, forming a protective layer on a side of the amorphous silicon layer away from the silicon wafer, performing laser processing on the protective layer and the amorphous silicon layer to form grooves, subjecting the silicon wafer to further processing to increase depths of the grooves, removing the protective layer, and subjecting the silicon wafer to high temperature processing to convert the amorphous silicon layer into a polycrystalline silicon layer.

Dependencies are inferred from the claim text.