US 2026/0037844 A1 · SUBSTRATE PROCESSING DEVICE INCLUDING MULTIPLE SENSORS AND METHOD OF OPERATING THE SAME

Abstract

A method includes generating first rarity data from first time series data acquired from a first source of a substrate processing device, the first time series data including a plurality of first component data acquired at a plurality of time points, the first rarity data indicating how rare each of the plurality of first component data is; generating second rarity data from second time series data acquired from a second source of the substrate processing device, the second time series data including a plurality of second component data acquired at a plurality of time points, the second rarity data indicating how rare each of the plurality of second component data is; generating first binary data on the basis of the first rarity data; generating second binary data on the basis of the second rarity data; generating a synchronization rate between the first time series data and the second time series data, by the use of the first binary data and the second binary data; and initiating a maintenance operation for the first source, the second source or the substrate processing device based on the first binary data, the second binary data, and the synchronization rate.

Claims20

Dependent claims

A method, comprising:

generating first rarity data from first time series data acquired from a first source of a substrate processing device, the first time series data including a plurality of first component data acquired at a plurality of time points, the first rarity data indicating how rare each of the plurality of first component data is;
generating second rarity data from second time series data acquired from a second source of the substrate processing device, the second time series data including a plurality of second component data acquired at a plurality of time points, the second rarity data indicating how rare each of the plurality of second component data is;
generating first binary data on the basis of the first rarity data;
generating second binary data on the basis of the second rarity data;
generating a synchronization rate between the first time series data and the second time series data, by using the first binary data and the second binary data;
and
initiating a maintenance operation for the first source, the second source, or the substrate processing device based on the first binary data, the second binary data, and the synchronization rate.

4 more elements

A method, comprising:

generating a plurality of rarity data on the basis of a plurality of time series data sets, each of the plurality of time series data sets is acquired from a corresponding sensor among a plurality of sensors of a substrate processing device, and each rarity data item indicates how rare each corresponding component data item of the time series data is;
generating a plurality of binary data based on the plurality of rarity data;
calculating a synchronization rate between the plurality of time series data sets, using the plurality of binary data;
determining that ones of the plurality of time series data sets whose calculated synchronization rate is greater than a preset reference value are in a state of being synchronized with each other;
clustering sensors of the plurality of sensors corresponding to the synchronized ones of the plurality of time series data sets;
and
initiating a maintenance operation for one or more of the plurality of sensors or the substrate processing device based on the plurality of binary data and the synchronization rate between the plurality of time series data sets,
wherein the calculation of the synchronization rate includes calculating an inner product between the plurality of binary data represented by vectors.

5 more elements

A method, comprising:

generating a plurality of binary data corresponding to a plurality of sensors of a substrate processing device, the binary data indicating whether a singularity is sensed in the corresponding sensor and a time point at which the singularity is sensed;
determining a correlation between the corresponding plurality of sensors based on an inner product between the plurality of binary data;
clustering the sensors determined to be correlated;
and
initiating a maintenance operation for one or more of the plurality sensors or the substrate processing device based on the binary data and the correlation between ones of the plurality of sensors.

2 more elements

Dependencies are inferred from the claim text.

Substrate processing device including multiple sensors and method of operating the same

Life of this patent

Substrate processing device including multiple sensors and method of operating the same

Life of this patent

Abstract

Claims20