Digital twin-based equipment monitoring system for modular cleanroom
AssigneeLocus Cell Co,.Ltd.
InventorsHeng-Yu Liu, Wei-Ting Lin, Chih-Wei Cheng, Hui-Ling Chen
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AssigneeLocus Cell Co,.Ltd.
InventorsHeng-Yu Liu, Wei-Ting Lin, Chih-Wei Cheng, Hui-Ling Chen
Estimating the term…
A digital twin-based equipment monitoring system for a modular cleanroom, comprising a 3D model construction module, a sensor data processing module, a digital twin module, and a visual display module. The 3D model construction module is configured to establish a 3D model of the modular cleanroom and equipment. The sensor data processing module is configured to detect an operating parameter of the equipment within the modular cleanroom and a consumable usage parameter, thereby generating corresponding equipment status data and consumable replacement data. The digital twin module is configured to perform a simulation calculation based on the equipment status data and consumable replacement data, and utilizes a machine learning model to predict a maintenance schedule and a consumable replacement timing for the equipment to generate corresponding maintenance recommendation data. The visual display module is configured to visualize the aforementioned data, providing a real-time alert and a maintenance recommendation to a user.
A digital twin-based equipment monitoring system for a modular cleanroom, the system comprising:
Dependencies are inferred from the claim text.