Vibrator Device, Electronic Apparatus, And Vehicle
AssigneeSeiko Epson Corporation
InventorsRyuta NISHIZAWA, Keiichi YAMAGUCHI, Seiichiro OGURA
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AssigneeSeiko Epson Corporation
InventorsRyuta NISHIZAWA, Keiichi YAMAGUCHI, Seiichiro OGURA
Estimating the term…
A vibrator device includes a vibrator element, and a support substrate disposed so as to be opposed to the vibrator element. The support substrate includes a base configured to support the vibrator element, a support configured to support the base, a plurality of beams configured to couple the base and the support to each other, and a drive signal interconnection, a drive constant-potential interconnection, a detection signal interconnection, and a detection constant-potential interconnection each laid around the base and the support passing the beams, and in predetermined one of the beams, at least one of the drive constant-potential interconnection and the detection constant-potential interconnection is disposed on a surface on the vibrator element side, and the detection signal interconnection is disposed on a surface on the opposite side.
A vibrator device comprising:
Dependencies are inferred from the claim text.