Standard sample for use in transmission electron microscope, method of preparing the same, method of adjusting transmission electron microscope, and method of analyzing observation image obtained with transmission electron microscope

A method of preparing a standard sample for use in a transmission electron microscope, comprising:

• a stacking step in which a plurality of materials is stacked on a surface of an observation sample to be observed with a transmission electron microscope;
• an observation surface formation step in which an observation surface that is a plane intersecting the surface of the observation sample and being connected to the observation sample is formed;
• and
• a film thinning step in which a thickness in a direction orthogonal to the observation surface is thinned.

A method of adjusting a transmission electron microscope, comprising:

• adjusting observation conditions to be used for observing an observation sample based on data obtained using a standard sample comprising
• a film stack that is formed by stacking a plurality of materials on a surface of an observation sample to be observed with the transmission electron microscope;
• and
• an observation surface that is a plane intersecting the surface of the observation sample and being connected to the observation sample.

A method of analyzing an observation image obtained using a transmission electron microscope, comprising:

• carrying out distinguishment or composition determination of a plurality of regions contained in an observation image of the observation sample based on data obtained using a standard sample comprising
• a film stack that is formed by stacking a plurality of materials on a surface of an observation sample to be observed with the transmission electron microscope;
• and
• an observation surface that is a plane intersecting the surface of the observation sample and being connected to the observation sample.