Processing apparatus, microscope, three-dimensional image generating method, and workpiece processing method

A microscope configured to observe an object, the microscope comprising:

• a light receiving element;
• a first lens configured to receive light from the object;
• a second lens configured to condense the light having passed through the first lens to form an intermediate image having an optical magnification M, the second lens satisfying a relational expression:
• ❘
• "\[LeftBracketingBar]"
• M
• -
• n
• ❘
• "\[RightBracketingBar]"
• ≤
• n
• ×
• 0.1
• ,
• where n denotes a refractive index of the object;
• an imaging optical system configured to form the light from the intermediate image on the light receiving element;
• and
• a diffraction grating disposed at a position of the intermediate image and configured to diffract the light from the second lens to guide the light to the imaging optical system, wherein
• the imaging optical system has an optical axis inclined with respect to an optical axis of the second lens and is configured to form, on the light receiving element, an inclined surface inclined in a direction not orthogonal to the optical axis of the second lens in the intermediate image, and
• the diffraction grating is disposed in such a manner that a normal line of the diffraction grating is parallel to the optical axis of the imaging optical system.