Laser ultrasonic inspection apparatus
AssigneeSeiko Epson Corporation
InventorKohei YAMADA
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AssigneeSeiko Epson Corporation
InventorKohei YAMADA
Estimating the term…
A laser ultrasonic inspection apparatus includes a first laser light source, and a laser interferometer configured to use a second laser beam to detect a vibration of the target, wherein the laser interferometer includes a second laser light source configured to irradiate the target with the second laser beam, a light modulator configured use a vibrator to modulate a frequency of the second laser beam, a photodetector configured to receive the second laser beam from the light modulator and the second laser beam from the target to output a light reception signal, and a signal processor configured to detect the vibration based on the light reception signal and a reference signal, and measure, based on the reference signal, an elapsed time from the first laser light source emits the first laser beam to the vibration is detected, and the vibrator is a signal source of the reference signal.
A laser ultrasonic inspection apparatus comprising:
A laser ultrasonic inspection apparatus comprising:
Dependencies are inferred from the claim text.