Adaptive count rate modulation to increase depth profile dynamic range in secondary ion mass spectroscopy
AssigneeNova Measuring Instruments Ltd.
InventorsBruno W. SCHUELER, Gabor TOTH
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Abstract
A method for adaptive secondary ion mass spectroscopy, the method may include (a) adaptively setting a detection parameter that impacts an instantaneous count rate of a detector; (b) scanning an evaluated sample with a focused primary ion beam; (c) sensing, by the detector, secondary ions ejected due to the scanning, to provide detection signals; and (d) analyzing a composition of the evaluated sample based on (i) the detection signals, and (ii) a mapping between values of the detection parameter and the instantaneous count rate of the detector.
Claims21
1-31. (canceled)
An adaptive secondary ion mass spectroscopy (SIMS) system, the SIMS system comprises:
- ion optics that is configured to scan an evaluated sample with a focused primary ion beam;
- a detector;
- a controller that is configured to set a detection parameter that impacts an instantaneous count rate of the detector;
- wherein the detector is configured to sense secondary ions ejected due to the scanning;
- and an analyzer that is configured to analyze a composition of the evaluated sample based on (i) the detection signals, and (ii) a mapping between values of the detection parameter and the instantaneous count rate of the detector.
A method for adaptive secondary ion mass spectroscopy, the method comprises:
- adaptively setting a detection parameter that impacts an instantaneous count rate of a detector;
- scanning an evaluated sample with a focused primary ion beam;
- sensing, by the detector, secondary ions ejected due to the scanning, to provide detection signals;
- and
- analyzing a composition of the evaluated sample based on (i) the detection signals, and (ii) a mapping between values of the detection parameter and the instantaneous count rate of the detector.
Dependencies are inferred from the claim text.