Mobile ultrapure water system

A method of facilitating temporary production of ultrapure water for use in a pre-commissioned semiconductor fabrication facility as primary level water for rinse or makeup water, the method comprising:

• providing a storage tank configured to connect to and receive pretreated water from an upstream water pretreatment system;
• delivering a mobile platform to the pre-commissioned semiconductor fabrication facility, the mobile platform including:
• an actinic radiation treatment apparatus having an inlet configured to connect to and receive the pretreated water from the storage tank, and a source of actinic radiation configured to irradiate the pretreated water to destroy organic contaminants in the pretreated water and form a first partially treated water;
• an electrically driven water treatment apparatus having an inlet configured to connect to and receive the first partially treated water from the actinic radiation treatment apparatus and to remove ionic contaminants from the first partially treated water and form a second partially treated water;
• an ion exchange media apparatus including ion exchange media, the ion exchange media apparatus configured to connect to and receive the second partially treated water from the electrically driven water treatment apparatus and remove one or more ionic species from the second partially treated water and form a third partially treated wastewater;
• and
• a pressure driven filtration sub-system configured to connect to and receive the third partially treated water from the ion exchange media apparatus and remove particulate matter from the third partially treated water to form the ultrapure water, the pressure driven filtration sub-system including an outlet connectable to a water distribution system for the pre-commissioned semiconductor fabrication facility and for recirculation of a portion of the ultrapure water to the storage tank.