Laser irradiation apparatus and laser irradiation method using the same

A laser irradiation method, the method comprising:

• irradiating a substrate with a first laser by using a first laser module to increase a temperature of the substrate to between a first temperature or higher and a second temperature or lower, wherein the second temperature is higher than the first temperature;
• and
• irradiating the substrate, by using a second laser module having a second laser which is different from the first laser and which includes a pulse laser,
• wherein the substrate is irradiated with the second laser for a time at which a temperature of the substrate is higher than the first temperature, and the second laser heals a surface of the substrate.