Processing system
AssigneeTokyo Electron Limited
InventorKento TOKAIRIN
Life of this patent
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Abstract
A processing system disclosed includes an atmosphere conveyance module, a conveyance device, and a cleaning device. The atmosphere conveyance module is capable of conveying a substrate in an atmosphere. The conveyance device includes an end effector including at least one support member on which the substrate is to be mounted. The conveyance device is provided in the atmosphere conveyance module and may convey the substrate. The cleaning device cleans the at least one support member.
Claims20
A processing system comprising:
- an atmosphere conveyance module capable of conveying a substrate in an atmosphere;
- a conveyance device that includes an end effector including at least one support member on which the substrate is configured to be mounted, is provided in the atmosphere conveyance module, and is configured to convey the substrate;
- and
- a cleaning device that cleans the at least one support member.
A non-transitory computer-readable medium storing instructions that, when executed by a processor of a control device in a processing system, cause the processor to:
- control a conveyance device to convey a substrate in an atmosphere conveyance module, the conveyance device including an end effector with at least one support member supporting the substrate;
- and
- control a cleaning device to clean the at least one support member.
A method of cleaning a support member in a processing system, the method comprising:
- conveying a substrate using a conveyance device in an atmosphere conveyance module, the conveyance device including an end effector with at least one support member supporting the substrate;
- detecting an abnormality in a suction force of the conveyance device based on pressure measurements;
- and
- cleaning the at least one support member using a cleaning device.
Dependencies are inferred from the claim text.