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US 2026/0020362 A1Published application
Ribbed substrate and optical semiconductor device
AssigneeKaneka Corporation
InventorsDaiki Kinoshita, Ayumu Ogawa, Yuta Saito
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Abstract
A ribbed substrate includes a transparent substrate and a rib member provided on one principal surface of the transparent substrate. The rib member is formed in a frame shape. An arithmetic mean roughness of an inner peripheral surface of the rib member is 50 nm or more and 3,000 nm or less. A value of a skewness of the inner peripheral surface of the rib member is preferably negative. The arithmetic mean roughness of the inner peripheral surface of the rib member is preferably 200 nm or more and 900 nm or less.
Claims14
A ribbed substrate comprising:
- a transparent substrate;
- and
- a rib member provided on one principal surface of the transparent substrate, wherein
- the rib member is formed in a frame shape, and
- an arithmetic mean roughness Ra of an inner peripheral surface of the rib member is 50 nm or more and 3,000 nm or less.
2 more elements
Dependencies are inferred from the claim text.