Semiconductor device and method of manufacturing semiconductor device
AssigneeJapan Display Inc.
InventorsHajime WATAKABE, Akihiro HANADA, Marina MOCHIZUKI, Ryo ONODERA, Fumiya KIMURA, Isao SUZUMURA
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AssigneeJapan Display Inc.
InventorsHajime WATAKABE, Akihiro HANADA, Marina MOCHIZUKI, Ryo ONODERA, Fumiya KIMURA, Isao SUZUMURA
Estimating the term…
The present invention provides a technology which realizes a reliable semiconductor device including a photosensor device by preventing pent roofs of edges of a P+ layer from being generated and a metal wiring installed over the P+ layer from coming down while securing the electrical conductivity of the P+ layer. The semiconductor device includes a photosensor including a photodiode formed on a substrate. The photodiode includes: a cathode electrode; a laminated structure that is formed on the cathode electrode and in which an N+ layer, an I layer, and a P+ layer are laminated in this order; an anode electrode formed on the P+ layer; a first insulating film formed so as to cover a portion of the anode electrode and edges of the laminated structure; and a metal wiring connected to the anode electrode. The edges of the laminated structure are formed in forward tapered shapes in a cross-sectional view.
A photodiode device comprising:
Dependencies are inferred from the claim text.