Superjunction device and method for producing a superjunction region

A method, comprising:

• forming a superjunction region of a superjunction device, wherein the superjunction device comprises:
• a semiconductor body comprising an inner region and an edge region laterally surrounding the inner region;
• a superjunction region comprising first regions of an effective first doping type and second regions of an effective second doping type arranged alternatingly in a first lateral direction of the semiconductor body,
• wherein in the inner region, the first regions have a first width and are spaced apart from each other at a first distance,
• wherein in the edge region, the first regions have a second width and are spaced apart from each other at a second distance,
• wherein in the inner region and the edge region, the first regions are elongated in a second lateral direction different from the first lateral direction, and
• wherein the second width is smaller than the first width and the second distance is smaller than the first distance,
• wherein forming the superjunction region comprises:
• implanting dopant atoms of the first doping type into a semiconductor layer having a doping concentration of the second doping type;
• and
• performing an annealing process.

A superjunction device, comprising:

• a semiconductor body comprising an inner region and an edge region laterally surrounding the inner region;
• and
• a superjunction region comprising first regions of an effective first doping type and second regions of an effective second doping type arranged alternatingly in a first lateral direction of the semiconductor body,
• wherein in the inner region, the first regions have a first width and are spaced apart from each other at a first distance,
• wherein in the edge region, the first regions have a second width and are spaced apart from each other at a second distance, and
• wherein in the inner region and the edge region, the first regions are elongated in a second lateral direction different from the first lateral direction.