Semiconductor device and method of manufacturing semiconductor device
AssigneeSK hynix Inc.
InventorsHyun Seung YOO, Eun Mee KWON, Eun Seok CHOI
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AssigneeSK hynix Inc.
InventorsHyun Seung YOO, Eun Mee KWON, Eun Seok CHOI
Estimating the term…
A semiconductor device may include a gate structure including alternately stacked insulating layers and conductive layers, a slit structure extending through the gate structure, a channel layer extending through the gate structure, a first data storage layer surrounding the channel layer, second data storage patterns respectively positioned between the conductive layers and the first data storage layer, first blocking patterns respectively positioned between the conductive layers and the second data storage patterns, and buffer patterns positioned between the insulating layers and the first data storage layer.
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.