Scattering measurement method and scattering measurement device
AssigneeHangzhou HFC Semiconductor Co.
InventorsZheng ZOU, Jun HE, Lezhong WU
Life of this patent
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Abstract
A scattering measurement method and a scattering measurement device are disclosed. In the scattering measurement method, wide-band IR measurement light is directed onto a substrate and then passes through a surface of the substrate and reaches a unit under measurement. The IR measurement light has a wavelength in the range of 2 μm to 7.5 μm, or of 25 μm to 35 μm. Scattered IR measurement light is then received from the substrate and the unit under measurement, from which characterizing parameters of the unit under measurement are determined.
Claims10
A scattering measurement method, comprising:
- providing a substrate with a unit under measurement formed therein, wherein the unit under measurement extends through a portion of the substrate in a thickness direction thereof;
- directing wide-band infrared (IR) measurement light onto the substrate, wherein the IR measurement light passes through a surface of the substrate and reaches the unit under measurement, and wherein the IR measurement light has a wavelength in a range of 2 μm to 7.5 μm, or of 25 μm to 35 μm;
- and
- receiving scattered IR measurement light from the substrate and the unit under measurement, wherein characterizing parameters of the unit under measurement are determined from the scattered IR measurement light, and wherein the characterizing parameters include at least one of a diameter, a width, a depth and a sidewall angle.
A scattering measurement device, comprising:
- a light source for providing wide-band infrared (IR) measurement light, wherein the IR measurement light passes through a surface of a substrate and reaches a unit under measurement in the substrate, wherein the unit under measurement extends through a portion of the substrate in a thickness direction thereof, and wherein the IR measurement light has a wavelength in a range of 2 μm to 7.5 μm, or of 25 μm to 35 μm;
- and
- a detector for receiving scattered IR measurement light from the unit under measurement, wherein characterizing parameters of the unit under measurement are determined from the scattered IR measurement light, and wherein the characterizing parameters include at least one of a diameter, a width, a depth and a sidewall angle.
Dependencies are inferred from the claim text.