Scroll vacuum pump and method for producing a scroll vacuum pump
AssigneePfeiffer Vacuum Technology AG
InventorsErhard HARAPAT, Lars PAULI, Jonas BECKER, Wolfgang SOEHNGEN
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AssigneePfeiffer Vacuum Technology AG
InventorsErhard HARAPAT, Lars PAULI, Jonas BECKER, Wolfgang SOEHNGEN
Estimating the term…
A scroll vacuum pump includes a pump system having a stationary spiral component and a movable spiral component cooperating with the stationary spiral component in a pump-active manner, a drive shaft that rotates about an axis of rotation during operation and that has an eccentric section for driving the movable spiral component, and an electric drive motor for the drive shaft. The movable spiral component includes a spiral arrangement, which has spiral walls, spiral grooves bounded by the spiral walls and a spiral base forming the base of the spiral grooves, and a support for the spiral arrangement. The support cooperates with the eccentric section of the drive shaft. The stationary spiral component includes a spiral arrangement, which has spiral walls and a spiral base, and a support for the spiral arrangement.
1-15. (canceled)
A scroll vacuum pump, comprising:
A method for manufacturing one of a scroll vacuum pump, a stationary spiral component, and a movable spiral component, the scroll vacuum pump comprising
A scroll vacuum pump, comprising:
Dependencies are inferred from the claim text.