Semiconductor crystal manufacturing apparatus

Abstract

In a semiconductor crystal manufacturing apparatus, a seed crystal made of a semiconductor is disposed on a pedestal arranged in a vacuum vessel. A semiconductor source gas is supplied to the seed crystal to grow a crystal on a surface of the seed crystal. The semiconductor crystal manufacturing apparatus includes: a heating device having an induction heating coil to heat a heated object arranged in the vacuum vessel; and a radiation suppressing member arranged between the heated object and the induction heating coil to suppresses radiation to the induction heating coil from the heated object heated by induction heating of the induction heating coil. The radiation suppressing member is a fibrous member arranged to surround the heated object.

Dependencies are inferred from the claim text.