Method for manufacturing a vibratory mechanical inertial sensor, sensor obtained by such a method and inertial unit including such a sensor
AssigneeJxsens
InventorJosé Louis BEITIA
Life of this patent
Estimating the term…
Loading patent…
AssigneeJxsens
InventorJosé Louis BEITIA
Estimating the term…
A method for manufacturing a vibratory mechanical inertial sensor, sensor obtained by such a method and inertial unit including such a sensor The invention relates to a method for manufacturing a vibratory inertial sensor (1), comprising a step of associating a test body (3) with a base (2), a step of assembling a cover (100) to said base (2) to form a casing within which said test body (3) is housed, a step of vacuuming said casing or filling the latter with a dry gas, and a step of magnetically shielding said casing that includes a first operation of depositing, by galvanoplasty, a first layer of a first ferromagnetic material on part at least of said casing. Vibratory inertial sensors
A method for manufacturing a vibratory mechanical inertial sensor (1), comprising a step of associating a test body (3) with a base (2), said test body (3) being designed to vibrate and/or deform and/or move, said method further comprising a step of assembling a cover (100) to said base (2) so that said cover (100) covers the test body (3) and forms with the base (2) a casing within which said test body (3) is housed, a step of vacuuming said casing or filling said casing with a dry gas, and a step of magnetically shielding said casing, which includes a first operation of depositing, by galvanoplasty, a first layer of a first ferromagnetic material on part at least of said casing.
Dependencies are inferred from the claim text.