Method of fabricating semiconductor optical device

Abstract

A method of fabricating a semiconductor optical device is provided. The method includes steps of: providing a semiconductor substrate having a first conductivity type; depositing a first cladding layer having the first conductivity type on the semiconductor substrate; depositing an active layer on the first cladding layer; depositing a second cladding layer having a second conductivity type on the active layer, wherein the second conductivity type is different from the first conductivity type; forming a patterned mask layer over the second cladding layer; and performing an etching operation to sequentially remove portions of the second cladding layer, the active layer and the first cladding layer exposed through the patterned mask layer, thereby forming a mesa structure on the semiconductor substrate, wherein the etching operation uses an etchant comprising Br-based chemicals.

Dependencies are inferred from the claim text.