Method for creating a sample for use in a charged particle microscope

Abstract

A method for creating a sample for use in a Charged Particle Microscope (CPM). The method comprises the steps of providing a specimen on a specimen carrier. Said specimen comprises a sample area having material from which a sample for use in a Charged Particle Microscope can be created. The sample area also comprises a region of interest that is to be included in said sample. The region of interest can be located in the material. As defined herein, at least one fluorescent fiducial is added to the sample area. Then, a fluorescent technique is used for locating said fluorescent fiducial. Subsequently, the region of interest is identified using said fluorescent technique. Finally, the sample can be created from said material including said region of interest. The method can be performed using a dual-beam FIB/SEM microscope.

Dependencies are inferred from the claim text.