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US 2026/0010068 A1Published application
Reticle container with sensor device
AssigneeGudeng Precision Industrial Co., Ltd.
InventorsMing-Chien Chiu, CHIA-HO CHUANG, Chang-Da LIU
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Abstract
A reticle container with a sensor device is provided. The reticle container includes an inner pod and an outer pod receiving the inner pod. The inner pod is provided with at least one sensor device. The sensor device continuously senses the state of the inner pod and outputs the sensed information.
Claims11
A reticle container, comprising an inner pod and an outer pod receiving the inner pod, the inner pod comprising:
- a base and a lid;
- and
- at least one sensor device disposed at the base and/or the lid and configured to continuously sense internal environmental states, external environmental states, or operating states of the inner pod,
- wherein, when the sensor device is disposed at the base, at least one receiving recess is disposed on an inner side or outer side of the base and configured to receive the sensor device.
1 more element
Dependencies are inferred from the claim text.