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US 2026/0005489 A1Published application
Multi-emitter laser device structures
AssigneeKYOCERA SLD Laser, Inc.
InventorsChristian Zollner, Phillip Skahan, Changmin Lee
Life of this patent
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Abstract
A laser device structure on a carrier substrate, a bonding material overlying the carrier substrate, an epitaxial region overlying the bonding material, a plurality of p-contacts disposed between a first surface of the epitaxial region and the bonding material, trenches extending on either side of and along longitudinal sides of each p-contact of the plurality of p-contacts, and a plurality of n-contacts disposed on a second surface of the epitaxial material opposite the first surface.
Claims20
A laser device structure comprising:
- a carrier substrate;
- a bonding material overlying the carrier substrate;
- an epitaxial region overlying the bonding material, the epitaxial region comprising at least one active region, the epitaxial region having a different composition than the carrier substrate;
- a p-contact disposed between a first surface of the epitaxial region and the bonding material, the p-contact at the bottom-side of an emitter ridge;
- trenches extending on either side of and along longitudinal sides of the p-contact so as to define a width of the emitter ridge, wherein the trenches are at least partially filled with a dielectric material, wherein the first surface of the epitaxial region between the trenches is adjacent to the p-contact, and wherein the first surface of the epitaxial region between the trenches is substantially co-planar with the first surface of the epitaxial region outside the trenches;
- and
- an n-contact disposed on a second surface of the epitaxial material opposite the first surface, the n-contact at the top-side of the emitter ridge.
4 more elements
A laser device structure of a plurality of emitters, comprising:
- a carrier substrate;
- a bonding material overlying the carrier substrate;
- an epitaxial region overlying the bonding material, the epitaxial region comprising at least one active region, the epitaxial region having a different composition than the carrier substrate;
- a plurality of p-contacts disposed between a first surface of the epitaxial region and the bonding material;
- trenches extending along longitudinal sides of each p-contact of the plurality of p-contacts, wherein the trenches extend from the first surface into the epitaxial region and are at least partially filled with a dielectric material, wherein the first surface of the epitaxial region between a first trench and a second trench is adjacent to a first p-contact and the first surface of the epitaxial region between the third trench and a fourth trench is adjacent to a second p-contact, wherein the first trench, the second trench, the third trench, and the fourth trench are sequential trenches, and wherein the first surface of the epitaxial region is substantially planar;
- and
- a plurality of n-contacts disposed on a second surface of the epitaxial material opposite the first surface, wherein adjacent ones of the plurality of n-contacts are separated by isolation trenches, the isolation trenches extending into the epitaxial material from the second surface of the epitaxial material.
4 more elements
Dependencies are inferred from the claim text.