Cantilever motion sensor
OwnerMichael Szelong, Bichoy Bahr +1inventors
InventorsMichael Szelong, Bichoy Bahr, Udit Rawat
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OwnerMichael Szelong, Bichoy Bahr +1inventors
InventorsMichael Szelong, Bichoy Bahr, Udit Rawat
Estimating the term…
A motion sensor is described including a semiconductor substrate including a cavity; a mass portion over a bottom of the cavity; a beam coupled between the mass portion and a side of the cavity; and a pair of sensing elements at a distal end of the beam away from the mass portion and being part of the beam or on two opposing sides of the beam. The motion sensor further includes a processing circuit coupled to the pair of sensing elements and configured to receive first signals from the pair of sensing elements and provide a second signal representing a measurement of a motion of the motion sensor based on the first signals.
An apparatus comprising:
An apparatus comprising:
An apparatus comprising
Dependencies are inferred from the claim text.