Multi-Channel Workpiece Inspection System
AssigneeWolfspeed, Inc.
InventorsEdward Robert Van Brunt, Jared A. Langan, Charles Henry Van Brackle
Life of this patent
Estimating the term…
Abstract
Described herein are systems and methods relating to inspecting semiconductor workpieces. In one example, the inspection system includes a first channel having a first imaging device configured to image the semiconductor workpiece on the workpiece using a first radiation source. The inspection system includes a second channel having a second imaging device configured to image the semiconductor workpiece on the workpiece holder using a second radiation source.
Claims20
A semiconductor workpiece inspection system comprising:
- a workpiece holder operable to hold a semiconductor workpiece;
- a first channel comprising a first imaging device configured to image the semiconductor workpiece on the workpiece holder using a first radiation source;
- and
- a second channel comprising a second imaging device configured to image the semiconductor workpiece on the workpiece holder using a second radiation source.
A semiconductor workpiece inspection system comprising:
- a photoluminescence imaging device configured to image a semiconductor workpiece by directing ultraviolet light at the semiconductor workpiece and detecting photoluminescence emitted from the semiconductor workpiece;
- and
- a birefringent contrast imaging device configured to image the semiconductor workpiece by directing polarized light at the semiconductor workpiece and detecting a light signal transmitted through the semiconductor workpiece.
A method comprising:
- receiving, using a first imaging device, first image data of a semiconductor workpiece on a semiconductor holder;
- receiving, using a second imaging device, second image data of the semiconductor workpiece on the semiconductor holder;
- and
- adjusting one or more imaging parameters of the first imaging device independently of the second imaging device.
Dependencies are inferred from the claim text.