Measuring apparatus, measuring method, and measuring program

A measuring method using a light source configured to emit measurement light having a wavelength that transmits through a measurement target object and a spectrometer configured to measure a spectroscopic spectrum waveform of light generated by reflection of the measurement light on the measurement target object, the measuring method comprising:

• executing Fourier transform of the spectroscopic spectrum waveform;
• extracting a waveform from a waveform obtained by the Fourier transform;
• calculating a phase angle at an amplitude peak position of the extracted waveform;
• calculating a temperature change amount or a thickness change amount of the measurement target object based on a change amount of the phase angle;
• and
• calculating a temperature of the measurement target object by adding the temperature change amount to a reference temperature, or calculating a thickness of the measurement target object by adding the thickness change amount to a reference thickness.

A non-transitory computer readable medium storing a computer program which is executed by a computer using a spectroscopic spectrum waveform of light generated by reflection of measurement light on a measurement target object, the computer program is configured to provide the steps of:

• executing Fourier transform of the spectroscopic spectrum waveform,
• extracting a waveform from a waveform obtained by the Fourier transform,
• calculating a phase angle at an amplitude peak position of the extracted waveform,
• calculating a temperature change amount or a thickness change amount of the measurement target object based on a change amount of the phase angle, and
• calculating a temperature of the measurement target object by adding the temperature change amount to a reference temperature, or calculate a thickness of the measurement target object by adding the thickness change amount to a reference thickness.