Electrodeposition systems

An electrodeposition system, comprising:

• a cathode chamber configured to hold a catholyte;
• a substrate holder configured to expose a substrate to the catholyte during an electrodeposition process;
• and
• an inert anode assembly comprising
• one or more inert anodes,
• two or more anolyte flow channels that define segmented areas of anolyte flow across the one or more inert anodes, and
• an ion exchange membrane positioned between the cathode chamber and the two or more anolyte flow channels.

An electrodeposition system, comprising:

• a cathode chamber configured to hold a catholyte;
• an anode chamber configured to hold an anolyte;
• a membrane frame supporting an ion exchange membrane positioned between the cathode chamber and the anode chamber;
• a substrate holder configured to expose a substrate to the catholyte during an electrodeposition process;
• an inert anode positioned within the anode chamber;
• and
• a bubble diverter positioned to direct a flow of bubbles generated at the inert anode to a stilling structure at which the bubbles are vented to atmosphere.