Substrate loading cassette

A substrate loading cassette, comprising:

• an upper frame;
• a lower frame disposed to face the upper frame;
• a support frame formed in a vertical direction of the substrate loading cassette, the support frame being configured to connect the upper frame and the lower frame to each other at an edge side of the substrate loading cassette;
• a transfer device coupling unit disposed on the upper frame, the transfer device coupling unit being coupled to a transfer device configured to transfer the substrate loading cassette, wherein
• the transfer device coupling unit comprises a transfer device coupling frame formed in a horizontal direction of the substrate loading cassette and a vibration damping portion disposed under the transfer device coupling frame,
• the support frame comprises a first support frame disposed on each of left and right sides of the substrate loading cassette and a second support frame disposed on a rear side of the substrate loading cassette,
• the substrate loading cassette comprises a support bar connected to the second support frame, the support bar having a shape extending inwardly of the substrate loading cassette,
• the vibration damping portion comprises polyamide resin,
• the vibration damping portion has a compression strength of 600 kg/cm2 or more, and
• the support bar has a modulus of elasticity of 0.03 MPa to 0.5 MPa.