Semiconductor device with porous layer and method for fabricating the same
AssigneeNanya Technology Corporation
InventorYUAN-YUAN LIN
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AssigneeNanya Technology Corporation
InventorYUAN-YUAN LIN
Estimating the term…
The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate; a bottom interconnector layer positioned in the substrate; a bottom dielectric layer positioned on the substrate; an interconnector structure positioned along the bottom dielectric layer, positioned on the bottom interconnector layer, and positioned on the bottom dielectric layer; a plurality of liners laterally positioned between the bottom dielectric layer and the interconnector structure and vertically positioned between the interconnector structure and the bottom interconnector layer; a top glue layer conformally positioned on the bottom dielectric layer and the interconnector structure; a top dielectric layer positioned surrounding the top glue layer. A top surface of the top glue layer and a top surface of the top dielectric layer are substantially coplanar. The top dielectric layer is porous.
A semiconductor device, comprising:
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