Substrate transfer apparatus and substrate processing apparatus including substrate transfer apparatus
AssigneeSCREEN Holdings Co., Ltd.
InventorTakashi SHINOHARA
Life of this patent
Estimating the term…
Abstract
A first hand includes a first pusher for gripping a substrate, the first pusher being provided at a proximal end of a branched blade and at a position sandwiched between a pair of first proximal end guides. A second hand includes a second pusher for gripping a substrate, the second pusher being provided at a position sandwiched between a pair of second proximal end guides. The first pusher includes a first member and a second member, against each of which the substrate comes into abutment, and the second pusher is provided at a position sandwiched between the first member and the second member.
Claims9
A substrate transfer apparatus, transferring a substrate, the substrate transferring apparatus comprising:
- a first hand, able to grip a substrate in a horizontal orientation;
- a second hand, able to grip a substrate, different from the substrate, in a horizontal orientation;
- a holder, aligning the first hand and the second hand in a vertical direction and holding the first hand and the second hand;
- an arm, movably supporting the holder;
- and
- a base member, supporting the arm,
- wherein the first hand comprises:
- a first blade;
- a pair of first proximal end guides, provided at a proximal end of the first blade and supporting the substrate by coming into contact with a bottom surface of the substrate;
- a pair of first distal end guides, provided at a distal end of the first blade and supporting the substrate by coming into contact with the bottom surface of the substrate;
- and a first pusher, provided for gripping the substrate, disposed at the proximal end of the first blade, and at a position sandwiched between the pair of first proximal end guides,
- the second hand comprises:
- a second blade;
- a pair of second proximal end guides, provided at a proximal end of the second blade and supporting the substrate by coming into contact with a bottom surface of the substrate;
- a pair of second distal end guides, provided at a distal end of the second blade and supporting the substrate by coming into contact with the bottom surface of the substrate;
- and a second pusher, provided for gripping the substrate, disposed at the proximal end of the second blade, at a position sandwiched between the pair of second proximal end guides, and
- the first pusher comprises a first member and a second member, each of the first member and the second member pressing the substrate forward by coming into abutment against the substrate, the second pusher comprises a third member that presses the substrate forward by coming into abutment against the substrate, and the third member is at a position sandwiched between the first member and the second member in a plan view.
Dependencies are inferred from the claim text.