Friction brake for articulating arm linkage
AssigneeApplied Materials, Inc.
InventorAlison Dsouza
Life of this patent
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AssigneeApplied Materials, Inc.
InventorAlison Dsouza
Estimating the term…
Exemplary articulating arms include a first articulating arm segment, a second articulating arm segment, and an articulating linkage movably connecting the first articulating arm segment and the second articulating arm segment. An articulating linkage includes a shaft having a first end and a second end, the shaft extending through the first articulating arm segment and the second articulating arm segment, and a friction brake comprising a tension block and a tension screw. Articulating arms include where the second end of the shaft is disposed in an aperture extending through the tension block, and the tension screw extends through the tension block in a direction generally perpendicular to the aperture.
An articulating arm, comprising:
An articulating arm, comprising:
A method of assembling a semiconductor processing chamber component comprising:
Dependencies are inferred from the claim text.