Photomask cleaning apparatus

Abstract

A photomask cleaning apparatus with a preferred static elimination function includes a cleaning device, a bearing base, an input tube and an output tube. The bearing base is disposed adjacent to the cleaning device and adapted to hold a photomask. The input tube is connected to the cleaning device, and adapted to guide ultrapure water with dissolved carbon dioxide towards the cleaning device for cleaning the photomask. The output tube is connected to the cleaning device, and adapted to drain the ultrapure water with the dissolved carbon dioxide for removing residual static electricity from the photomask.

Dependencies are inferred from the claim text.