Neural multifunctional device and method of manufacturing the same

A manufacturing method of a neural multifunctional device comprising:

• forming a stack in which a two-dimensional nanomaterial layer and a mask layer are sequentially arranged on a substrate, wherein the two-dimensional nanomaterial layer has a plurality of holes, the mask layer has a plurality of openings each exposing the plurality of holes, and the opening has a larger diameter than that of the hole corresponding thereto and exposes a region of the two-dimensional nanomaterial layer around the hole;
• forming a plurality of nanotubes each vertically disposed on the region of the two-dimensional nanomaterial layer exposed around the plurality of holes by the mask layer and having a passage for substance movement therein;
• forming a binding layer on the mask layer to fill a region between and around the plurality of nanotubes to a given height;
• and
• forming an electrode structure arranged to be electrically connected to at least a portion of the plurality of nanotubes on the binding layer,
• wherein the plurality of nanotubes are configured to perform at least one of electrical measurement and stimulation application to a nerve cell and transfer of substance to the nerve cell through the passage.

A neural multifunctional device comprising:

• a two-dimensional nanomaterial layer in which a plurality of holes are formed;
• a mask layer disposed on the two-dimensional nanomaterial layer and having a plurality of openings each exposing the plurality of holes;
• a plurality of nanotubes each vertically disposed on the region of the two-dimensional nanomaterial layer exposed around the plurality of holes by the mask layer;
• a binding layer disposed on the mask layer to fill a region between and around the plurality of nanotubes to a given height;
• and
• an electrode structure disposed on the binding layer to be electrically connected to at least a portion of the plurality of nanotubes.