On-chip optical through-silicon via
AssigneeInternational Business Machines Corporation
InventorsHsianghan Hsu, Qianwen Chen, Neng Liu, John Knickerbocker
Life of this patent
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Abstract
A semiconductor optical waveguide is provided. The semiconductor optical waveguide has a semiconductor substrate. The semiconductor substrate defines opposing top and bottom surfaces, and an optical TSV extending substantially perpendicular to the top and bottom surfaces. The semiconductor waveguide further includes a waveguide optical circuit on the semiconductor substrate and optically connected to the optical TSV.
Claims20
A co-packaged optics (CPO) integrated circuit chip, comprising:
- a semiconductor substrate, defining:
- opposing top and bottom surfaces;
- and
- an optical through-substrate via (optical TSV) extending substantially perpendicular to the top and bottom surfaces;
- a waveguide optical circuit on the semiconductor substrate and optically connected to the optical TSV;
- and
- a computer processor based electronic circuit on the semiconductor substrate.
A method of making a semiconductor optical waveguide, comprising:
- etching a mold wafer to form a waveguide cavity feature;
- etching a substrate wafer to form an optical through-substrate via (optical TSV) feature;
- depositing a waveguide layer on the waveguide cavity feature in the mold wafer;
- polishing the mold wafer to form a waveguide feature;
- bonding the mold wafer to the substrate wafer to optically connect the waveguide feature in the mold wafer to the optical TSV feature in the substrate wafer;
- and
- releasing the mold wafer from the waveguide feature.
A semiconductor optical waveguide, comprising:
- a semiconductor substrate, defining:
- opposing top and bottom surfaces;
- and
- an optical through-substrate via (optical TSV) extending substantially perpendicular to the top and bottom surfaces;
- and
- a waveguide optical circuit on the semiconductor substrate and optically connected to the optical TSV.
Dependencies are inferred from the claim text.