Laser process to enhance the wire bonding process
AssigneeTurning Point Lasers Corporation
InventorsSzutsun Simon Ou, Hung Sheng Lee, Chi Luen Wang, Han Wei Chang, Chung Cheng Lin
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AssigneeTurning Point Lasers Corporation
InventorsSzutsun Simon Ou, Hung Sheng Lee, Chi Luen Wang, Han Wei Chang, Chung Cheng Lin
Estimating the term…
A laser process to enhance the wire bonding process, using before wire bonding, the laser process of the present invention uses a laser processing system to clean the surface oxide where the wire and the substrate are to be joint, then locally heated the substrate, then form a molten pool at the joint position, then uses the wire bonding to join the wire and the substrate. Laser cleaning of the substrate surface can reduce impurities at the bonding interface, and local heating to form the molten pool can make the metal easier to melt, thus reducing the resistance value after bonding and improving
A laser process to enhance the wire bonding process, the process steps comprising:
Dependencies are inferred from the claim text.