Laser processing apparatus, irradiated facet specifying method, and laser beam applying method
AssigneeDisco Corporation
InventorsHaruki KAMIYAMA, Kazuhiko IDA, Nobuyuki KIMURA
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AssigneeDisco Corporation
InventorsHaruki KAMIYAMA, Kazuhiko IDA, Nobuyuki KIMURA
Estimating the term…
A laser processing apparatus includes a laser oscillator for emitting a laser beam, a polygon mirror having a plurality of reflective facets and rotatable for scanning the laser beam, a beam condenser for focusing the laser beam scanned by the polygon mirror, a detectable mark rotatable together with the polygon mirror, and a sensor for detecting the detectable mark, the sensor being not rotatable together with the polygon mirror. An irradiated facet that is irradiated with the laser beam is specified among the reflective facets on the basis of the detection of the detectable mark by the sensor.
A laser processing apparatus comprising:
An irradiated facet specifying method for specifying an irradiated facet that is irradiated with a laser beam among a plurality of reflective facets of a polygon mirror, comprising:
A laser beam applying method of applying a laser beam to a plurality of reflective facets of a polygon mirror, comprising:
Dependencies are inferred from the claim text.